In the process of setting up a new plasma system for our lab I had to install some gas lines for process gas delivery. This included using the Swagelok® orbital tube welder, which is always fun. For process, or wafer touching gases, we're using stainless steel 316L cleaned using Swagelok® specs for producing ultrahigh-purity (UHP) electro-polished stainless steel products. Welding is a 4 stage process with a ceriated tungsten electrode under an argon atmosphere to produce a clean metal join. For a couple more pictures go to my gallery.
